Triangular shaped beam technique in EB exposure system EX-7 for ULSI pattern formation

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[1] Hattori, Kiyoshi
[2] Ikenaga, Osamu
[3] Wada, Hirotsugu
[4] Tamamushi, Syuichi
[5] Nishimura, Eiji
[6] Ikeda, Naotaka
[7] Katoh, Yoshihide
[8] Kusakabe, Hideo
[9] Yoshikawa, Ryoichi
[10] Takigawa, Tadahiro
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Hattori, Kiyoshi | 1600年 / 28期
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