SPREAD OF PCM CARRIES LSI TO REGENERATIVE AMPLIFIERS.

被引:0
|
作者
Berry, Tac
机构
来源
Electronics | 1980年 / 53卷 / 19期
关键词
ELECTROOPTICAL DEVICES - SEMICONDUCTING FILMS;
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摘要
A new techniue of molecular-beam epitaxy (MBE) is described that achieves epitaxial growth on a heated single-crystal substrate placed in an ultrahigh vacuum (UHV) through the reaction of multiple molecular beams of differing intensity and chemistry. Planar epitaxial structures of optoelectronic and microwave devices are possible applications of the MBE.
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页码:149 / 153
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