SARISA - FOR THOSE DIFFICULT TO DETECT SPUTTERED ATOMS.

被引：0

作者：

Gruen, D.M.

Pellin, M.J.

Young, C.E.

Calaway, W.F.

机构：

来源：

Research and Development (Barrington, Illinois) | 1984年 / 26卷 / 03期

关键词：

ION BEAMS - LASERS - Applications - SPUTTERING - VACUUM TECHNOLOGY;

D O I：

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学科分类号：

摘要：

Surface analysis by resonance ionization of sputtered atoms (SARISA) shows promise as a high-sensitivity technique. The SARISA system promises a sensitivity increase of at least three orders of magnitude over mass spectrometer-based techniques. The system detects multiphoton ionized atoms directly by extraction into a spiraltron while discriminating against backscattered primary and secondary ions.

引用

页码：153 / 154