Effect of annealing atmosphere on the delamination of Pt layer in SiO2/Pt/PZT/Pt ferroelectric capacitor

被引：0
|
作者：
Electronic Materials Lab., Material and Device Sector, Samsung Adv. Institute of Technology, P.O. Box 111, Suwon 440-600, Korea, Republic of [1 ]
不详 [2 ]
机构：
来源：
Integr Ferroelectr | / 1卷 / 331-340期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [21] Crystallization of thin polycrystalline PZT films on Si/SiO2/Pt substrates
    I. P. Pronin
    E. Yu. Kaptelov
    S. V. Senkevich
    V. A. Klimov
    N. V. Zaĭtseva
    T. A. Shaplygina
    V. P. Pronin
    S. A. Kukushkin
    Physics of the Solid State, 2010, 52 : 132 - 136
  • [22] Crystallization of thin polycrystalline PZT films on Si/SiO2/Pt substrates
    Pronin, I. P.
    Kaptelov, E. Yu.
    Senkevich, S. V.
    Klimov, V. A.
    Zaitseva, N. V.
    Shaplygina, T. A.
    Pronin, V. P.
    Kukushkin, S. A.
    PHYSICS OF THE SOLID STATE, 2010, 52 (01) : 132 - 136
  • [23] Pt particles sintering on Pt/SiO2 during water denitrification
    Zaki, A.
    Lancelot, C.
    Dacquin, J. P.
    Granger, P.
    CATALYSIS COMMUNICATIONS, 2021, 148
  • [24] Pt particles sintering on Pt/SiO2 during water denitrification
    Zaki, A.
    Lancelot, C.
    Dacquin, J.P.
    Granger, P.
    Catalysis Communications, 2021, 148
  • [25] Orientation control in PZT/Pt/TiN multilayers with various Si and SiO2 underlayers for high performance ferroelectric memories
    Kushida-Abdelghafar, K
    Torii, K
    Mine, T
    Kachi, T
    Fujisaki, Y
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (01): : 231 - 236
  • [26] Domain and domain wall structure of PT/PZT/PT ferroelectric thin film
    Wang, Long-Hai
    Yu, Jun
    Liu, Feng
    Zheng, Chao-Dan
    Li, Jia
    Wang, Yun-Bo
    Gao, Jun-Xiong
    Wang, Zhi-Hong
    Zeng, Hui-Zhong
    Zhao, Su-Ling
    Wuli Xuebao/Acta Physica Sinica, 2006, 55 (05): : 2590 - 2595
  • [27] The domain and domain wall structure of PT/PZT/PT ferroelectric thin film
    Wang Long-Hai
    Yu Jun
    Liu Feng
    Zheng Chao-Dan
    Li Jia
    Wang Yun-Bo
    Gao Jun-Xiong
    Wang Zhi-Ho
    Zeng Hui-Zhong
    Zhao Su-Ling
    ACTA PHYSICA SINICA, 2006, 55 (05) : 2590 - 2595
  • [28] Responsivity enhancement of ZnO/Pt/MgZnO/SiO2 and MgZnO/Pt/ZnO/SiO2 structured ultraviolet detectors by surface plasmons in Pt nanoparticles
    Sun, Long
    Jiang, Dayong
    Zhang, Guoyu
    Liu, Rusheng
    Duan, Qian
    Qin, Jieming
    Liang, Qingcheng
    Gao, Shang
    Hou, Janhua
    Zhao, Jianxun
    Liu, Wanqiang
    Shen, Xiande
    JOURNAL OF APPLIED PHYSICS, 2016, 119 (04)
  • [29] Comparative study of air and vacuum annealing atmosphere towards Pt/Ti-W/SiO2 stability
    Simon, Pardis
    Nazon, Julien
    Domenichini, Bruno
    Bourgeois, Sylvie
    THIN SOLID FILMS, 2013, 548 : 138 - 142
  • [30] Nanocrystalline Pt interfacial layer formed by stress in a SrBi2Ta2O9–Pt–Ti ferroelectric capacitor
    Ching-Chich Leu
    Journal of Materials Research, 2007, 22 : 1718 - 1725
12345