Evaluation method of precipitated oxygen concentration in low resistivity silicon wafers using x-ray diffraction

被引：0
作者：
Takeno, Hiroshi [1 ]
Mizuno, Michihiro [1 ]
Ushio, Satoshi [1 ]
Takenaka, Takao [1 ]
机构：
[1] Shin-Etsu Handotai Co, Ltd, Gunma, Japan
来源：
Materials Science Forum | 1995年 / 196-201卷 / pt 4期
关键词：
X ray diffraction;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1865 / 1870
相关论文
共 50 条
  • [41] A Deconvolution Method for the Mapping of Residual Stresses by X-Ray Diffraction
    Tajdary, P.
    Morin, L.
    Braham, C.
    Gonzalez, G.
    EXPERIMENTAL MECHANICS, 2022, 62 (08) : 1349 - 1362
  • [42] Calculating x-ray diffraction on crystals by means of the differential method
    Kharitonov, Sergey I.
    Kazanskiy, Nikolay L.
    Volotovskiy, Sergey G.
    Khonina, Svetlana N.
    OPTICAL TECHNOLOGIES FOR TELECOMMUNICATIONS 2015, 2016, 9807
  • [43] Method for Determining Crystal Grain Size by X-Ray Diffraction
    He, Kai
    Chen, Nuofu
    Wang, Congjie
    Wei, Lishuai
    Chen, Jikun
    CRYSTAL RESEARCH AND TECHNOLOGY, 2018, 53 (02)
  • [44] Structural Characterization of Gallbladder Stones Using Energy Dispersive X-ray Spectroscopy and X-ray Diffraction
    Almarshad, Hassan A.
    Badawy, Sayed M.
    Alsharari, Abdalkarem F.
    COMBINATORIAL CHEMISTRY & HIGH THROUGHPUT SCREENING, 2018, 21 (07) : 495 - 500
  • [45] Classification of counterfeit coins using multivariate analysis with X-ray diffraction and X-ray fluorescence methods
    Hida, M
    Sato, H
    Sugawara, H
    Mitsui, T
    FORENSIC SCIENCE INTERNATIONAL, 2001, 115 (1-2) : 129 - 134
  • [46] Radial oxygen precipitation of a 12" CZ silicon crystal studied in-situ with high energy X-ray diffraction
    Bergmann, Christoph
    Will, Johannes
    Groeschel, Alexander
    Weisser, Matthias
    Magerl, Andreas
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2014, 211 (11): : 2450 - 2454
  • [47] X-ray Diffraction Analysis on Effect of Time Reaction and Alkali Concentration in Merlinoite
    Heraldy, Eddy
    Cahyo, Syaiful Ahmad Nur
    Indri, Nurul Apri
    Rahmawati, Fitria
    6TH INTERNATIONAL CONFERENCE OF THE INDONESIAN CHEMICAL SOCIETY, 2018, 1095
  • [48] X-ray powder diffraction analysis of a silicon carbide-based ceramic
    Ortiz, AL
    Sánchez-Bajo, F
    Cumbrera, FL
    Guiberteau, F
    MATERIALS LETTERS, 2001, 49 (02) : 137 - 145
  • [49] X-ray Diffraction Analysis of Damaged Layer During Polishing of Silicon Carbide
    Jung, Hokyoung
    Jeong, Seonho
    Park, Youngwook
    Shin, Yeongil
    Jeong, Haedo
    INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2023, 24 (01) : 25 - 32
  • [50] Analysis of Stress in Silicon-Based Microsystems by X-ray Diffraction Techniques
    Bandi, T.
    Dommann, A.
    Neels, A.
    2013 EUROPEAN MICROELECTRONICS PACKAGING CONFERENCE (EMPC), 2013,
12345