Smart power technology with dielectric insulation. Processes and applications

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作者：
Vogt, H. [1 ]
机构：
[1] Fraunhofer-Inst of Microelectronic, Circuits and Systems, Duisburg, Germany
来源：
Electron Technology (Warsaw) | 1993年 / 26卷 / 01期
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页码：83 / 93
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