Admittance analysis of an MIS structure made with PECVD deposited a-SiNx:H thin films

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Department of Physics, M. East. Technical University, 06531, Ankara, Turkey [1 ]
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J Non Cryst Solids | / 2-3卷 / 131-144期
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This work was carried out with the financial support of both the Turkish Scientific and Technical Research Council (TUBITAK – TBAG – Project No. 1538) and State Planning Organization (DPT – Project No. AFP-01-05DPT96 K 121560);
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