共 50 条
- [32] Deposition of silicon nitride films by pulsed laser ablation of the Si target in nitrogen gas JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2002, 20 (01): : 30 - 32
- [34] Synthesis and deposition of silicon nitride films by laser reactive ablation of silicon in low pressure ammonia: A parametric study JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1996, 14 (04): : 1986 - 1994
- [38] Refractive index modification during deposition of silicon oxynitride films prepared by reactive laser ablation ADVANCES IN LASER ABLATION OF MATERIALS, 1998, 526 : 97 - 102
- [39] Synthesis of silicon-based polymer films by UV laser ablation deposition of poly(methylphenylsilane) MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1998, 246 (1-2): : 36 - 44
- [40] Deposition of oxide nanostructures by nanosecond laser ablation of silicon in an oxygen-containing background gas Thermophysics and Aeromechanics, 2021, 28 : 549 - 554