SnO2 gas-sensing thin film produced by metallorganic deposition

被引：0
|
作者：
Lin, Haian [1 ]
Wu, Chongruo [1 ]
Xing, Jian [1 ]
机构：
[1] Southeast Univ, Nanjing, China
来源：
Weixi Jiagong Jishu/Microfabrication Technology | 1993年 / 04期
关键词：
Deposition - Gas detectors - Gas sensing electrodes - Metallic films - Oxides;
D O I：
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中图分类号：
学科分类号：
摘要：
Metallorganic deposition is an economic method for forming metallorganic film by coating or printing metallorganic solution on a substrate. The metallorganic film can then be sintered to make metallic film or metallic oxide film. SnO2 gas-sensing thin film produced by metallorganic deposition has advantages over by physical vapor deposition and chemical vapor deposition in simpler equipment and better doping control. This paper introduced the process of making SnO2 gas-sensing thin film by metallorganic deposition and doped with antimony to modulate resistance. The gas-sensing characteristics of the film were studied.
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页码：35 / 39
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