Structure stability of hydrogenated amorphous carbon film during thermal annealing

被引：0
|
作者：
机构：
来源：
J Non Cryst Solids | / 1-2卷 / 145期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] STRUCTURE STABILITY OF HYDROGENATED AMORPHOUS-CARBON FILM DURING THERMAL ANNEALING
    TANG, XM
    WEBER, J
    MIKHAILOV, SN
    MULLER, C
    HANNI, W
    HINTERMANN, HE
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1995, 185 (1-2) : 145 - 150
  • [2] Annealing Treatment of Hydrogenated Amorphous Carbon Film is Affected by Its Intrinsic Structure
    Jia Q.
    Zhang B.
    Lai Z.-G.
    Zhang J.-Y.
    Surface Technology, 2022, 51 (07): : 98 - 106
  • [3] THERMAL AND HYDROGEN PLASMA ANNEALING OF AMORPHOUS HYDROGENATED CARBON
    LIN, SH
    FELDMAN, BJ
    SOLID STATE COMMUNICATIONS, 1991, 80 (06) : 371 - 372
  • [4] The Results of Annealing Treatment of Hydrogenated Amorphous Carbon Film Is Affected by Its Intrinsic Structure
    Huang M.-B.
    Lai Z.-G.
    Zhang B.
    Long M.-B.
    Gao K.-X.
    Zhang J.-Y.
    Surface Technology, 2022, 51 (10): : 192 - 199
  • [5] Thermal stability of copper amorphous hydrogenated carbon-nitrogen thin film bilayers
    Lacerda, MM
    Freire, FL
    Esteves, JHCR
    Achete, CA
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1997, 30 (06) : 944 - 951
  • [6] THERMAL-STABILITY AND ELECTRICAL-PROPERTIES OF HYDROGENATED AMORPHOUS-CARBON FILM
    CALLEGARI, A
    BUCHANAN, DA
    HOVEL, H
    SIMONYI, E
    MARWICK, A
    LUSTIG, NE
    APPLIED PHYSICS LETTERS, 1994, 65 (25) : 3200 - 3202
  • [7] Crystallization of hydrogenated amorphous silicon carbon films with laser and thermal annealing
    Basa, D. K.
    Ambrosone, G.
    Coscia, U.
    Setaro, A.
    APPLIED SURFACE SCIENCE, 2009, 255 (10) : 5528 - 5531
  • [8] Stress reduction and bond stability during thermal annealing of tetrahedral amorphous carbon
    Ferrari, AC
    Kleinsorge, B
    Morrison, NA
    Hart, A
    Stolojan, V
    Robertson, J
    JOURNAL OF APPLIED PHYSICS, 1999, 85 (10) : 7191 - 7197
  • [9] Phase stabilization by rapid thermal annealing in amorphous hydrogenated silicon nitride film
    Singh, Sarab Preet
    Srivastava, P.
    Ghosh, S.
    Khan, Saif Ali
    Prakash, G. Vijaya
    JOURNAL OF PHYSICS-CONDENSED MATTER, 2009, 21 (09)
  • [10] Influence of oxygen on the thermal stability of amorphous hydrogenated carbon films
    Zhang, Q
    Yoon, SF
    Rusli
    Yang, H
    Ahn, J
    JOURNAL OF APPLIED PHYSICS, 1998, 83 (03) : 1349 - 1353
12345