THERMODYNAMIC CALCULATIONS FOR THE CHEMICAL VAPOR DEPOSITION OF SILICON CARBIDE.

被引：0
|
作者：
Kingon, Angus I.
Lutz, Leonard J.
Davis, Robert F.
Liaw, P.
机构：
来源：
| 1600年 / 66期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [21] Conformal and superconformal chemical vapor deposition of silicon carbide coatings
    Huang, Jing-Jia
    Militzer, Christian
    Wijayawardhana, Charles
    Forsberg, Urban
    Pedersen, Henrik
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2022, 40 (05):
  • [22] Effect of temperature on the chemical vapor deposition of silicon carbide coatings
    Lu, Cui-Ying
    Cheng, Lai-Fei
    Zhao, Chun-Nian
    Zhang, Li-Tong
    Xu, Yong-Dong
    Cailiao Kexue yu Gongyi/Material Science and Technology, 2010, 18 (04): : 575 - 578
  • [23] Modeling of silicon carbide chemical vapor deposition in a vertical reactor
    Vorob'ev, AN
    Egorov, YE
    Makarov, YN
    Zhmakin, AI
    Galyukov, AO
    Rupp, R
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1999, 61-2 : 172 - 175
  • [24] Kinetics of halide chemical vapor deposition of silicon carbide film
    Wang, Rong
    Ma, Ronghui
    JOURNAL OF CRYSTAL GROWTH, 2007, 308 (01) : 189 - 197
  • [25] Characterization of Silicon Carbide Films Prepared by Chemical Vapor Deposition
    Meng Fantao
    Du Shanyi
    Zhang Yumin
    TESTING AND EVALUATION OF INORGANIC MATERIALS I, 2011, 177 : 78 - 81
  • [26] Chemical vapor deposition method for the manufacture of silicon carbide tubes
    Zhao, Guo Ying
    Zhu, Ching Wen
    Revankar, Vithal
    Hlavacek, Vladimir
    1600, (184):
  • [27] METALLIC COATING OF SILICON CARBIDE FILAMENTS BY CHEMICAL VAPOR DEPOSITION
    VILLARD, M
    CLOUET, A
    MARCHAL, M
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1970, 117 (03) : C106 - &
  • [28] SINTERED SILICON CARBIDE.
    Knoch, H.
    Kracker, J.
    CFI Ceramic Forum International, 1987, 64 (05): : 159 - 163
  • [29] SOLDERING OF SILICON CARBIDE.
    Shibalov, M.V.
    Welding Production (English translation of Svarochnoe Proizvodstvo), 1974, 21 (01): : 56 - 58
  • [30] Silicon carbide. The forgotten refractory
    Thomson, J.
    Key Engineering Materials, 1991, 53-55 : 575 - 578
12345