Fundamental theory for ion contributions to radio frequency discharges between planar electrodes

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机构：

[1] Nonaka, Shigehiko

来源：

Nonaka, Shigehiko | 1600年 / 30期

关键词：

Planar Electrodes - RF Plasmas;

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[1] FUNDAMENTAL THEORY FOR ION CONTRIBUTIONS TO RADIO-FREQUENCY DISCHARGES BETWEEN PLANAR ELECTRODES
NONAKA, S
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (06): : 1266 - 1271
[2] FUNDAMENTAL THEORY FOR MAGNETIZED RADIOFREQUENCY DISCHARGES BETWEEN PLANAR ELECTRODES AND ITS APPLICATION TO THE ECR CASE
NONAKA, S
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1991, 60 (12) : 4133 - 4145
[3] Fundamental features of plasma impedance in planar radio-frequency discharges
Nonaka, Shigehiko, 1600, (30):
[4] FUNDAMENTAL-SOLUTIONS FOR RADIO-FREQUENCY DISCHARGES BETWEEN DIELECTRIC-COVERED PARALLEL-PLATE ELECTRODES
NONAKA, S
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1990, 59 (09) : 3217 - 3226
[5] Transmission line theory for long plasma production by radio frequency discharges between parallel-plate electrodes
Nonaka, S.
Proceedings of the Asia Pacific Physics Conference, 1991,
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[8] A normal mode theory of capacitive radio frequency discharges between parallel electrodes under diffusion and recombination gas-discharge regimes
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[9] A STUDY OF THE INCENDIVITY OF ELECTRICAL DISCHARGES BETWEEN PLANAR RESISTIVE ELECTRODES
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