Chemical treatment effects of Si surfaces in NH4OH:H2O2:H2O solutions studied by spectroscopic ellipsometry

被引：0
|
作者：
Adachi, Sadao [1 ]
Utani, Katsuyuki [1 ]
机构：
[1] Gunma Univ, Gunma, Japan
来源：
Japanese Journal of Applied Physics, Part 2: Letters | 1993年 / 32卷 / 9 A期
关键词：
Ammonium compounds - Composition effects - Ellipsometry - Etching - Hydrogen peroxide - Oxidation - Oxides - Solutions - Spectroscopy - Surface properties - Water;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Chemically treated Si surfaces in 1NH4OH:XH2O2:5H2O (X = 0 and 1) solutions at 80 °C have been studied using spectroscopic ellipsometry (SE). The SE data clearly indicate that the X = 0 solution results in surface roughening while the X = 1 solution, in surface chemical oxidation. It is found that chemical oxidation occurs immediately upon immersing the sample in the X = 1 solution. The thickness of the oxide is also found to show a saturated value of approximately 11 angstroms against immersion time t.
引用
收藏
相关论文
共 50 条
  • [41] Modeling of H2O, H2O2, and H2O3 formation mechanisms on graphene oxide (GO) surfaces
    Gomez, Hector, Jr.
    Groves, Michael N.
    CARBON, 2021, 177 : 252 - 259
  • [42] A hydrothermal investigation of the 1/2V2O5-H2C2O4/H3PO4/NH4OH system:: Synthesis and structures of (NH4)VOPO4•1.5H2O, (NH4)0.5VOPO4•1.5H2O, (NH4)2[VO(H2O)3]2[VO(H2O)][VO(PO4)2]2•3H2O, and (NH4)2[VO(HPO4)]2(C2O4)•5H2O
    Do, J
    Bontchev, RP
    Jacobson, AJ
    INORGANIC CHEMISTRY, 2000, 39 (15) : 3230 - 3237
  • [43] ADSORPTION OF H2S, H2O AND O2 ON SI(111) SURFACES
    FUJIWARA, K
    OGATA, H
    NISHIJIMA, M
    SOLID STATE COMMUNICATIONS, 1977, 21 (09) : 895 - 897
  • [44] H2O2 photoproduction inside H2O and H2O:O2 ices at 20–140 K
    Mikhail Yu. Kulikov
    Alexander M. Feigin
    Otto Schrems
    Scientific Reports, 9
  • [45] Properties of (H2O)n, (H2O)n, and (H2O)nH+ clusters.
    Jordan, KD
    Vila, F
    Christie, R
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1999, 218 : U387 - U387
  • [46] GaSb AND GaAs CHEMICAL POLISHING BY HF:H2O2:CITRIC ACID: H2O
    Rosendo, E. R.
    Olvera, J. O.
    Diaz, T. D.
    Rojas, M. R.
    de Anda, F.
    ACTA CRYSTALLOGRAPHICA A-FOUNDATION AND ADVANCES, 2002, 58 : C162 - C162
  • [47] GITTERKONSTANTEN UND RAUMGRUPPE DER ISOTYPEN VERBINDUNGEN EU(OH)2 H2O SR(OH)2 H2O UND BA(OH)2 H2O
    BARNIGHAUSEN, H
    ZEITSCHRIFT FUR ANORGANISCHE UND ALLGEMEINE CHEMIE, 1966, 342 (5-6): : 233 - +
  • [48] Thermal Conductivity and Density of (NH4)2SO4 + H2O, NH4NO3 + H2O, and (NH4)2SO4 + NH4NO3 + H2O Solutions at T = (278.15 to 333.15) K
    Che, Yuan-Yuan
    Shen, Jian
    Zhou, Jun-Chao
    He, Chao-Hong
    JOURNAL OF CHEMICAL AND ENGINEERING DATA, 2012, 57 (05): : 1486 - 1491
  • [49] ABINITIO STUDIES OF NEGATIVE-ION MOLECULE(S) CLUSTERS PRESENT IN THE ATMOSPHERE .2. OH-(H2O)0, OH-(H2O)2, OH-(H2O)3, OH-(H2O)4
    SAPSE, AM
    OSORIO, L
    SNYDER, G
    INTERNATIONAL JOURNAL OF QUANTUM CHEMISTRY, 1984, 26 (02) : 223 - 230
  • [50] Impact of H2O–Si(OC2H5)4 and H2O–C2H5OH Molar Ratios in the H2O–Si(OC2H5)4–NH3–C2H5OH Mixtures on Structural and Spectral Features of Synthetic Photonic Crystals Based on SiO2
    I. I. Yurasova
    N. I. Yurasov
    N. K. Galkin
    E. V. Kukueva
    A. N. Zakharov
    Russian Journal of General Chemistry, 2022, 92 : 2005 - 2015
12345