Low temperature growth of heavily carbon-doped GaAs by metalorganic molecular beam epitaxy with elemental gallium

被引:0
作者
Nagao, Keisuke [1 ]
Shirakashi, Jun-ichi [1 ]
Konagai, Makoto [1 ]
Takahashi, Kiyoshi [1 ]
机构
[1] Tokyo Inst of Technology, Tokyo, Japan
来源
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1994年 / 33卷 / 11期
关键词
Elemental gallium - Heavy doping - Low temperature growth - Mass flow controller - Metalorganic molecular beam epitaxy - Monomethylgallium - Trimethylgallium;
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页码:6090 / 6094
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