3D calibration of a scanning force microscope with internal laser interferometers

被引：0
|
作者：
Bienias, M. [1 ]
Gao, S. [1 ]
Hasche, K. [1 ]
Seemann, R. [1 ]
Thiele, K. [1 ]
机构：
[1] Physikalisch-Technische, Bundesanstalt, Berlin, Germany
来源：
| 1997年 / John Wiley & Sons Ltd, Chichester, United Kingdom卷 / 25期
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D O I：
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学科分类号：
摘要：
6
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页码：7 / 8
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