共 50 条
- [1] A novel Cu(II) chemical vapor deposition precursor: Synthesis, characterization, and chemical vapor deposition Journal of Materials Research, 1998, 13 : 687 - 692
- [5] Copper chemical vapor deposition using a novel Cu(II) precursor for contact via filling process MATERIALS, PROCESSES, INTEGRATION AND RELIABILITY IN ADVANCED INTERCONNECTS FOR MICRO- AND NANOELECTRONICS, 2007, 990 : 207 - 211
- [7] PRECURSOR DESIGN FOR CHEMICAL VAPOR-DEPOSITION ACTA CHEMICA SCANDINAVICA, 1991, 45 (08): : 864 - 869
- [8] Ni precursor for chemical vapor deposition of NiSi JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (4B): : 1833 - 1836