Electron temperature in RF discharge plasma of CF4/N2 mixture

被引：0

作者：

Kobayashi, Hidehiko ^{[1
]}

Ishikawa, Itsuo ^{[1
]}

Suganomata, Shinji ^{[1
]}

机构：

[1] Yamanashi Univ, Kofu, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1994年 / 33卷 / 10期

关键词：

Carbon inorganic compounds - Electric discharges - Electric resistance - Electrodes - Electrons - Nitrogen - Temperature measurement - Thermal effects;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

In 1 MHz discharges of CF4/N2 mixtures at a total pressure of 0.5 Torr, the synergistic variation of the electron temperature was observed with various gas mixing ratios. This variation at CF4 ratio of around 95% is ascribed to the enhancement of electronegativity, and another at CF4 ratio of around 20% is due to the expansion of the discharge region outward from the space between electrodes.

引用

页码：5979 / 5980