Multifunction scanning probe microscope with needle sensor

被引：0

作者：

Wang, Xuefang

Zhang, Honghai

Wang, Sheng

Xu, Long

机构：

来源：

Huazhong Ligong Daxue Xuebao/Journal Huazhong (Central China) University of Science and Technology | 2000年 / 28卷 / 05期

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摘要：

A complicated cantilever and optical detection device are placed by 1 MHz quartz resonator in SPM. It made SPM simple and cheap. It is shown that this measurement method is feasible. STM, AFM, MFM and EFM is integrated on a single instrument for many parameters measurement by changing the tip and some modules.

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