Diamond films synthesized by microwave plasma CVD

被引:0
|
作者
机构
[1] Zhang, Zhiming
[2] Hong, Ailing
[3] Zhuang, Zichen
[4] Zhu, Pingfang
[5] Wan, Chen
来源
Zhang, Zhiming | 1600年 / 42期
关键词
Microwave Plasma Chemical Vapor Deposition;
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [41] NUMERICAL SIMULATIONS OF MICROWAVE PLASMA REACTORS FOR DIAMOND CVD
    FUNER, M
    WILD, C
    KOIDL, P
    SURFACE & COATINGS TECHNOLOGY, 1995, 74-5 (1-3): : 221 - 226
  • [42] Diamond synthesized by DC-plasma CVD at high gravity
    Nakazato, M
    Suzuki, T
    Nagasaka, Y
    Abe, Y
    Bellingeri, S
    Maizza, G
    PROCESSING BY CENTRIFUGATION, 2001, : 107 - 112
  • [43] Optical properties of diamond films deposited by low temperature microwave plasma CVD from camphor
    Kar, S
    Chaudhuri, S
    MATERIALS LETTERS, 2004, 58 (24) : 3029 - 3033
  • [44] Microstructural and electrical studies of nitrogen doped diamond thin films grown by microwave plasma CVD
    Young, TF
    Liu, TS
    Jung, DJ
    Hsi, TS
    SURFACE & COATINGS TECHNOLOGY, 2006, 200 (10): : 3145 - 3150
  • [45] The preparation of diamond/tungsten-carbide composite films by microwave plasma-assisted CVD
    Samra, Hisham Abit
    Hong, Ruijiang
    Jiang, Xin
    CHEMICAL VAPOR DEPOSITION, 2007, 13 (01) : 17 - +
  • [46] Growing sub-micron diamond films by a novel microwave plasma jet CVD system
    Lin, Chii-Ruey
    Su, Chun-Hsi
    Liao, Guo-Tsai
    Hung, Hsin-Chin
    Hsu, Chih-Ming
    2006 IEEE INTERNATIONAL CONFERENCE ON SYSTEMS, MAN, AND CYBERNETICS, VOLS 1-6, PROCEEDINGS, 2006, : 4733 - +
  • [47] Microwave plasma CVD of diamond films on high concentration alloys: Microstructure, hardness and wear properties
    Zeng, Zhen
    Zong, Qun
    Sun, Shaoheng
    Wang, Yongsheng
    Wu, Yanxia
    Zheng, Ke
    Zhou, Bing
    Yu, Shengwang
    VACUUM, 2024, 222
  • [48] Nitrogen incorporated diamond-like carbon films by microwave surface wave plasma CVD
    Tian, XM
    Adhikari, S
    Adhikary, S
    Uchida, H
    Umeno, M
    Soga, T
    Jimbo, T
    DIAMOND AND RELATED MATERIALS, 2005, 14 (11-12) : 1839 - 1842
  • [49] Growth of nanocrystalline diamond films deposited by microwave plasma CVD system at low substrate temperatures
    Potocky, S.
    Kromka, A.
    Potmesil, J.
    Remes, Z.
    Polackova, Z.
    Vanecek, M.
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2006, 203 (12): : 3011 - 3015
  • [50] RAMAN CHARACTERIZATION OF DIAMOND AND CARBON-FILMS GROWN BY REMOTE MICROWAVE PLASMA ENHANCED CVD
    MERMOUX, M
    ROY, F
    MARCUS, B
    ABELLO, L
    LUCAZEAU, G
    DIAMOND AND RELATED MATERIALS, 1992, 1 (5-6) : 519 - 524