XPS spectra of thin CNx films prepared by chemical vapor deposition

被引：2
|
作者：
Beshkov, G. [1 ]
Dimitrov, D.B. [1 ]
Georgiev, St. [1 ]
Juan-Cheng, D. [1 ]
Petrov, P. [1 ]
Velchev, N. [1 ]
Krastev, V. [1 ]
机构：
[1] Bulgarian Acad of Sciences, Sofia, Bulgaria
来源：
Diamond and Related Materials | 1999年 / 8卷 / 02期
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页码：591 / 594
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