共 50 条
[31]
High precision two-stage robust temperature control for accelerometer unit
[J].
Hangkong Xuebao,
2009, 6 (1103-1108)
[33]
High-precision visual control of mobile manipulators
[J].
IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION,
2002, 18 (06)
:957-965
[34]
High-precision magnetic levitation stage for photolithography
[J].
PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING,
1998, 22 (02)
:66-77
[35]
HIGH-PRECISION 2-COORDINATE STAGE
[J].
SOVIET JOURNAL OF OPTICAL TECHNOLOGY,
1985, 52 (04)
:236-237
[36]
High-precision magnetic levitation stage for photolithography
[J].
Precision Engineering,
1998, 22 (03)
:66-77
[37]
A high-precision, magnetically levitated positioning stage
[J].
IEEE CONTROL SYSTEMS MAGAZINE,
2006, 26 (03)
:82-95
[38]
High-precision magnetic levitation stage for photolithography
[J].
PROCEEDINGS OF THE TWELFTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING,
1997,
:470-473