Structural characterization of ultrathin nanocrystalline silicon films formed by annealing amorphous silicon

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作者：
Lutzen, J.
Kamal, A.H.M.
Kozicki, M.N.
Ferry, D.K.
Sidorov, M.V.
Smith, David J.
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Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 1998年 / 16卷 / 05期
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