Piezoresistive Linearity Error of Integrated Full-Bridge Structures.

被引:0
作者
Jenschke, W. [1 ]
机构
[1] Technische Univ Dresden, Dresden, East Ger, Technische Univ Dresden, Dresden, East Ger
来源
Feingeratetechnik Berlin | 1985年 / 34卷 / 10期
关键词
INTEGRATED CIRCUITS - Design - MATHEMATICAL TECHNIQUES - Transfer Functions;
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学科分类号
摘要
Approximate solutions for nonlinear transfer functions of integrated piezoresistive full bridges of various crystallographic orientations on bending beams are presented. Linear bridge transfer factors and bridge linearity errors are calculated. Various resistor arrangements for rectangular bending plates used in pressure measurement engineering are discussed on the basis of the linearity error.
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页码:459 / 462
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