PRECIOUS METAL COATINGS FOR MICROWAVE INTEGRATED CIRCUITS.

被引：0
|
作者：
Bachner, Frank J. [1 ]
Nguyen, Pascaline H. [1 ]
机构：
[1] Ceramic Process Systems, Watertown,, MA, USA, Ceramic Process Systems, Watertown, MA, USA
来源：
Metal Finishing | 1988年 / 86卷 / 01期
关键词：
COATINGS - Sputtering - GOLD AND ALLOYS - Industrial Applications - PALLADIUM AND ALLOYS - Industrial Applications - PLATINUM AND ALLOYS - Industrial Applications - SILVER AND ALLOYS - Industrial Applications;
D O I：
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中图分类号：
学科分类号：
摘要：
Precious metal coatings have many applications in the fabrication of hybrid microwave integrated circuit (MIC) substrates. These coatings are used because of their high conductivity, nobility, barrier properties to intermetallic diffusion, bondability, metallurgy and selective etching characteristics. In this paper the use of sputtering, metallo-organic deposition and electroplating as they are used to fabricate high resolution, controlled impedance interconnect substrates for MICs is discussed.
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页码：23 / 25
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