PLASMA ETCHING CHAMBER.

被引：0
|
作者：
Desilets, B.H.
机构：
来源：
IBM technical disclosure bulletin | 1983年 / 26卷 / 7 B期
关键词：
PLASMA ETCHING;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：3567 / 3569
相关论文
共 50 条
  • [1] The weeping chamber.
    Hudak, M
    LIBRARY JOURNAL, 1998, 123 (06) : 74 - 74
  • [2] The Echo Chamber.
    Restaino, Leann
    LIBRARY JOURNAL, 2011, 136 (12) : 78 - 78
  • [3] BEAM-GENERATED WAVES IN A LARGE PLASMA CHAMBER.
    Kellogg, Paul J.
    Monson, Steven J.
    Holzworth, Robert H.
    Jost, R.Jerry
    IEEE Transactions on Plasma Science, 1986, PS-14 (06) : 891 - 901
  • [4] Calorimetric respiratory chamber.
    Letulle
    Pompilian
    COMPTES RENDUS HEBDOMADAIRES DES SEANCES DE L ACADEMIE DES SCIENCES, 1906, 143 : 932 - 933
  • [5] HEAT EXCHANGE IN A PLASMA CHEMICAL REACTOR WITH MULTIJET MIXING CHAMBER.
    Belov, B.A.
    Sal'nikova, N.S.
    Suris, A.L.
    Journal of Engineering Physics (English Translation of Inzhenerno-Fizicheskii Zhurnal), 1985, 49 (01): : 858 - 861
  • [6] INDUCTION DRIFT CHAMBER.
    Roderburg, E.
    Baecker, A.
    Krieger, H.
    Mattern, D.
    Walenta, A.H.
    Zech, G.
    Nuclear instruments and methods in physics research, 1986, A252 (2-3): : 285 - 291
  • [7] About the Geiger chamber.
    Wulf, T
    PHYSIKALISCHE ZEITSCHRIFT, 1925, 26 : 382 - 391
  • [8] OPAL JET CHAMBER.
    Heuer, R.D.
    Wagner, A.
    Nuclear instruments and methods in physics research, 1987, A265 (1-2): : 11 - 19
  • [9] VISBREAKING WITH A REACTION CHAMBER.
    Gerasicheva, Z.V.
    Soskind, D.M.
    Melik-Akhnazarov, T.Kh.
    Voronova, O.K.
    Tomarkova, M.A.
    Chemistry and Technology of Fuels and Oils, 1987, 23 (02) : 60 - 64
  • [10] Information on the catalytic chamber.
    Wendelstadt, H
    Binz, A
    BERICHTE DER DEUTSCHEN CHEMISCHEN GESELLSCHAFT, 1906, 39 : 1627 - 1631
12345