Simultaneous measurements of energetic O- ions and O atoms in sputtering of zinc oxide target

被引：0

作者：

Tominaga, Kikuo ^{[1
]}

Sueyoshi, Yasuhiko ^{[1
]}

Imai, Hiroshi ^{[1
]}

Chong, Munfei ^{[1
]}

Shintani, Yoshihiro ^{[1
]}

机构：

[1] Univ of Tokushima, Tokushima, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1993年 / 32卷 / 10期

关键词：

Energetic neutral oxygen atoms - Energetic oxygen ions - Flux intensity - Gas pressure - Planar magnetron sputtering - Time of flight method;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：4745 / 4749