Improvement of the dielectric properties of Ta2O5 through substitution with Al2O3

被引:0
|
作者
Bell Lab, Murray Hill, United States [1 ]
机构
来源
Appl Phys Lett | / 11卷 / 1396-1398期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [31] THIN-FILMS OF AL2O3 AND TA2O5 OBTAINED BY MAGNETRON REACTIVE SPUTTERING
    MUTIHAC, R
    OPREA, A
    REVUE ROUMAINE DE CHIMIE, 1991, 36 (1-3) : 49 - 54
  • [32] Electrical characteristics of Ti-O/Ta2O5 thin film sputtered on Ta/Ti/Al2O3 substrate
    Kim, HJ
    Song, JS
    Kim, IS
    Kim, SS
    THIN SOLID FILMS, 2004, 446 (01) : 124 - 127
  • [33] Fabrication of Coatings with Targeted Tunable Electrical Properties via ALD: Al2O3/ZnO and Nb2O5/Ta2O5
    Brodie, Alan
    De Cecco, Paola
    Bevis, Chris
    Maldonado, Juan R.
    Bhatia, Ritwik
    Deguns, Eric
    Sundaram, Ganesh
    ATOMIC LAYER DEPOSITION APPLICATIONS 6, 2010, 33 (02): : 101 - 110
  • [34] Experimental measurements of mechanical dissipation associated with dielectric coatings formed using SiO2, Ta2O5 and Al2O3
    Crooks, D. R. M.
    Cagnoli, G.
    Fejer, M. M.
    Harry, G.
    Hough, J.
    Khuri-Yakub, B. T.
    Penn, S.
    Route, R.
    Rowan, S.
    Sneddon, P. H.
    Wygant, I. O.
    Yaralioglu, G. G.
    CLASSICAL AND QUANTUM GRAVITY, 2006, 23 (15) : 4953 - 4965
  • [35] Introduction of charge-trapping Al2O3/Ta2O5/Al2O3 dielectric stack in AlGaN/GaN high electron mobility transistors for programmable threshold voltage
    Pohekar, Prachi
    Upadhyay, Bhanu B.
    Parvez, Bazila
    Ganguly, Swaroop
    Saha, Dipankar
    APPLIED PHYSICS LETTERS, 2025, 126 (11)
  • [36] Dielectric properties of Bi2O3–ZnO–Ta2O5 ceramics sintered by microwave
    Bo Shen
    Liping Kang
    Xi Yao
    Journal of Electroceramics, 2008, 21 : 448 - 451
  • [37] INFLUENCE OF SIO2 AT THE TA2O5/SI INTERFACE ON DIELECTRIC CHARACTERISTICS OF TA2O5 CAPACITORS
    NISHIOKA, Y
    SHINRIKI, H
    MUKAI, K
    JOURNAL OF APPLIED PHYSICS, 1987, 61 (06) : 2335 - 2338
  • [38] Improvement of thermoelectric properties of β-FeSi2 by the addition of Ta2O5
    Morikawa, Kentarou
    Chikauchi, Hiroyuki
    Mizoguchi, Hiroyuki
    Sugihara, Sunao
    MATERIALS TRANSACTIONS, 2007, 48 (08) : 2100 - 2103
  • [39] INFRARED TRANSMISSION OF (R2O OR R'O)-(TIO2,NB2O5 OR TA2O5)-AL2O3 GLASSES
    KOKUBO, T
    NISHIMURA, M
    TASHIRO, M
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1976, 22 (01) : 125 - 134
  • [40] Thermo-optic properties of TiO2, Ta2O5 and Al2O3 thin films for integrated optics on silicon
    Wiechmann, Stefan
    Mueller, Joerg
    THIN SOLID FILMS, 2009, 517 (24) : 6847 - 6849