How ion-beam etching the surface of optical articles affects the chemical composition of optical materials

被引：0
|
作者：
Mikhnev, R.A. [1 ]
Shtandel', S.K. [1 ]
Martynov, M.I. [2 ]
Elesin, L.A. [2 ]
机构：
[1] Lytkarino Optical-Glass Fact., Inc., Lytkarino, Moscow, Russia
[2] Kurchatov Inst. Russ. Sci. Center, Moscow, Russia
来源：
Journal of Optical Technology (A Translation of Opticheskii Zhurnal) | 1999年 / 66卷 / 12期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1029 / 1031
相关论文
共 50 条
  • [41] Ion sources for microsize ion-beam treatment of optical parts
    Michnev, R.A.
    Shtandel, S.K.
    Belokurov, A.P.
    Martynov, M.I.
    Review of Scientific Instruments, 1998, 69 (2 pt 2): : 899 - 901
  • [42] COMPARISON OF PROPERTIES OF DIFFERENT MATERIALS USED AS MASKS FOR ION-BEAM ETCHING
    CANTAGREL, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1340 - 1343
  • [43] ION-BEAM ANALYSIS OF THE EFFECTS OF RADIATION ON THE CHEMICAL ETCHING OF POLY(TETRAFLUORETHYLENE)
    ARNOLD, GW
    RYE, RR
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 46 (1-4): : 330 - 333
  • [44] ION-BEAM ASSISTED CHEMICAL ETCHING OF SI BY SF6
    AFFOLTER, K
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (01): : 19 - 23
  • [45] STUDIES OF FERROELECTRIC SURFACES USING ION-BEAM AND CHEMICAL ETCHING TECHNIQUES
    TONGSON, LL
    BHALLA, AS
    CROSS, LE
    FERROELECTRICS, 1981, 36 (1-4) : 471 - 474
  • [46] CHEMICAL AND PHYSICAL SPUTTERING IN F+ ION-BEAM ETCHING OF SI
    TACHI, S
    MIYAKE, K
    TOKUYAMA, T
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1981, 20 (06) : L411 - L413
  • [47] OPTICAL-PROPERTIES OF ION-BEAM MICROTEXTURED SURFACES
    ROSSNAGEL, SM
    ROBINSON, RS
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03): : 336 - 337
  • [48] ANALYSIS AND CONTROL OF ION-BEAM PROCESSING BY OPTICAL SPECTROSCOPY
    HEINRICH, F
    HOFFMANN, P
    VACUUM, 1993, 44 (3-4) : 275 - 279
  • [49] ION-BEAM INTERFERENCE COATING FOR ULTRALOW OPTICAL LOSS
    WEI, DT
    APPLIED OPTICS, 1989, 28 (14): : 2813 - 2816
  • [50] ION-BEAM EFFECTS ON OPTICAL AND RHEOLOGICAL PROPERTIES OF POLYSTYRENE
    CALCAGNO, L
    COMPAGNINI, G
    FOTI, G
    PHYSICAL REVIEW B, 1992, 46 (17): : 10573 - 10578
12345