How ion-beam etching the surface of optical articles affects the chemical composition of optical materials

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Mikhnev, R.A. [1 ]
Shtandel', S.K. [1 ]
Martynov, M.I. [2 ]
Elesin, L.A. [2 ]
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[1] Lytkarino Optical-Glass Fact., Inc., Lytkarino, Moscow, Russia
[2] Kurchatov Inst. Russ. Sci. Center, Moscow, Russia
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页码:1029 / 1031
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