Micromachined field emission devices

被引：0
|
作者：
Cornell Univ, Ithaca, United States [1 ]
机构：
来源：
Microelectron Eng | / 1-4卷 / 523-526期
关键词：
Computer simulation - Electrodes - Electron guns - Electronic properties - Microelectromechanical devices - Micromachining - Monte Carlo methods - Optical properties - Resistors - Semiconducting silicon - Tungsten;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
We present the application of micromachining technology to silicon-based field emission devices. Silicide formation on the emitter is shown to lead to lower voltage emission. Integration of series resistors and heaters is achieved by silicon bulk-micromachining. Multiple levels of tungsten electrodes are integrated by surface micromachining. This allows the integration of an entire micromachined electron gun array (MEGA) on a single silicon substrate. We review simulation results to illustrate the electron-optical properties of MEGA and show fabrication results and emission data.
引用
收藏
相关论文
共 50 条
  • [41] Semi-shunt field emission in electronic devices
    Karpov, V. G.
    Shvydka, Diana
    APPLIED PHYSICS LETTERS, 2014, 105 (05)
  • [42] Field emission magnetic sensors based on focusing devices
    Marqués, MI
    Serena, PA
    Nicolaescu, D
    Correia, A
    SOLID-STATE ELECTRONICS, 2001, 45 (06) : 977 - 986
  • [43] Development of in situ analyzer of field-emission devices
    Kawasaki, Michito
    He, Zhen
    Gotoh, Yasuhito
    Tsuji, Hiroshi
    Ishikawa, Junzo
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2010, 28 (02): : C2A77 - C2A82
  • [44] The selection and design of electrode materials for field emission devices
    Zhao, Shanhai
    Ding, Hao
    Li, Xiaoqin
    Cao, Haijing
    Zhu, Yanyan
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2023, 167
  • [45] Simulation of planar deflection systems for field emission devices
    Cui, Z
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (03): : 1077 - 1081
  • [46] Wide band gap materials for field emission devices
    Zhirnov, VV
    Wojak, GJ
    Choi, WB
    Cuomo, JJ
    Hren, JJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1997, 15 (03): : 1733 - 1738
  • [47] Mechanical single nanopillars and arrays as field emission devices
    Qin, Hua
    Kim, Hyun S.
    Park, Jonghoo
    Blick, Robert H.
    2008 3RD IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3, 2008, : 899 - 902
  • [48] Micromachined Probes for Characterization of Terahertz Devices
    Weikle, Robert M., II
    Barker, N. Scott
    Lichtenberger, Arthur W.
    Bauwens, Matthew F.
    Alijabbari, Naser
    2014 39TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES (IRMMW-THZ), 2014,
  • [49] Micromachined Devices for Use in Terahertz Applications
    Wood, David
    Chamberlain, Martyn
    Baragwanath, Adam
    Dodd, Linzi
    Hill, Carlo
    Gallant, Andrew
    NEXT GENERATION MICRO/NANO SYSTEMS, 2013, 81 : 20 - 27
  • [50] Flexible Field Emission Devices Based On BaO Nanowires
    Cui, Yunkang
    Chen, Jing
    Zhang, Xiaobing
    Lei, Wei
    Di, Yunsong
    2015 28TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE (IVNC), 2015, : 210 - 211
12345