Micromachined field emission devices

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作者：
Cornell Univ, Ithaca, United States [1 ]
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来源：
Microelectron Eng | / 1-4卷 / 523-526期
关键词：
Computer simulation - Electrodes - Electron guns - Electronic properties - Microelectromechanical devices - Micromachining - Monte Carlo methods - Optical properties - Resistors - Semiconducting silicon - Tungsten;
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摘要：
We present the application of micromachining technology to silicon-based field emission devices. Silicide formation on the emitter is shown to lead to lower voltage emission. Integration of series resistors and heaters is achieved by silicon bulk-micromachining. Multiple levels of tungsten electrodes are integrated by surface micromachining. This allows the integration of an entire micromachined electron gun array (MEGA) on a single silicon substrate. We review simulation results to illustrate the electron-optical properties of MEGA and show fabrication results and emission data.
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