Laser-induced fast etching and metallization of SiC ceramics

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Appl Surf Sci | / 559-562期

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[21] EXCIMER LASER-INDUCED SELECTIVE DEPOSITION AND ETCHING OF SEMICONDUCTOR-FILMS - DEPOSITION OF CRYSTALLINE SI AND RESISTLESS ETCHING OF SIC
MURAHARA, M
SCIENCE OF SUPERCONDUCTIVITY AND NEW MATERIALS, 1989, 18 : 253 - 268
[22] LASER-INDUCED FAILURE OF TRANSPARENT CERAMICS
MECHOLSKY, JJ
SPANN, JR
FREIMAN, SW
RICE, RW
AMERICAN CERAMIC SOCIETY BULLETIN, 1977, 56 (03): : 293 - 293
[23] METALLIZATION OF SIC CERAMICS WITH CR VAPOR
TAKASHIMA, T
YAMAMOTO, T
NARITA, T
NIPPON SERAMIKKUSU KYOKAI GAKUJUTSU RONBUNSHI-JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 1989, 97 (01): : 38 - 42
[24] Metallization of SiC ceramics: Chemical aspects
Kodentsov, A
vanLoo, FJJ
PROCEEDINGS OF THE NINTH INTERNATIONAL CONFERENCE ON HIGH TEMPERATURE MATERIALS CHEMISTRY, 1997, 97 (39): : 468 - 471
[25] LASER-INDUCED ATOMIC CHLORINE ETCHING OF SILICON
TREYZ, GV
SCARMOZZINO, R
BURKE, HH
OSGOOD, RM
LASER- AND PARTICLE-BEAM CHEMICAL PROCESSES ON SURFACES, 1989, 129 : 291 - 297
[26] EXCIMER LASER-INDUCED ETCHING OF SEMICONDUCTORS AND METALS
PEYRE, JL
RIVIERE, D
VANNIER, C
VILLELA, G
ELECTRICAL COMMUNICATION, 1988, 62 (3-4): : 222 - 228
[27] LASER-INDUCED SYNTHESIS, DEPOSITION AND ETCHING OF MATERIALS
OGALE, SB
BULLETIN OF MATERIALS SCIENCE, 1988, 11 (2-3) : 137 - 157
[28] Laser-induced backside wet etching of sapphire
Niino, H. (niino.hiro@aist.go.jp), 1600, Japan Society of Applied Physics (42):
[29] RAPID LASER-INDUCED CHEMICAL ETCHING OF SEMICONDUCTORS
HOULE, FA
PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1983, 385 : 127 - 130
[30] LASER-INDUCED MICROSCOPIC ETCHING OF GAAS AND INP
EHRLICH, DJ
OSGOOD, RM
DEUTSCH, TF
APPLIED PHYSICS LETTERS, 1980, 36 (08) : 698 - 700

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