Automatic measuring and monitoring system of beam spot of electron beam exposure machine

被引：0

作者：

Chen, Zhensheng ^{[1
]}

Yang, Licai ^{[1
]}

Zhang, Yulin ^{[1
]}

机构：

[1] Shandong Univ of Technology, Jinan, China

来源：

Weixi Jiagong Jishu/Microfabrication Technology | 1996年 / 04期

关键词：

Automation - Computer applications - Monitoring - Optical variables measurement;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

An automatic measuring and monitoring system of electron beam exposure machine was designed on the bases of the relations among spot diameter, beam current and lens current and the principle of measuring beam spot by knife edge method. The system has bus construction and uses IBM-PC/AT computer as master computer, including a bus drive board for bus expanding, an electron beam scanning control board and a beam current signal data acquisition board, so that higher measurement accuracy and better reliability of adjustment can be reached.

引用

页码：16 / 22