Thermochemistry and kinetics of gas-phase reactions relevant to the CVD of coatings: new data for process models

被引：0
|
作者：
Allendorf, M.D. [1 ]
Melius, C.F. [1 ]
Mcdaniel, A.H. [1 ]
机构：
[1] Combustion Research Facility, Sandia National Laboratories, Livermore, CA 94551-0969, United States
来源：
Materials Research Society Symposium - Proceedings | 1999年 / 555卷
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：121 / 134
相关论文
共 50 条
  • [41] COMPUTER-SIMULATION OF THE KINETICS OF COMPLICATED GAS-PHASE REACTIONS
    EBERT, KH
    EDERER, HJ
    ISBARN, G
    ANGEWANDTE CHEMIE-INTERNATIONAL EDITION IN ENGLISH, 1980, 19 (05): : 333 - 343
  • [42] Kinetics of Gas-phase Ion-Molecule Exchange Reactions
    Karachevtsev, G.V.
    Marutkin, A.Z.
    Savkin, V.V.
    Russian Chemical Reviews, 1982, 51 (11) : 1060 - 1074
  • [43] GAS-PHASE KINETICS AND MECHANISMS OF REACTIONS OF LARGE RADICALS AND MOLECULES
    MONTAGUE, DC
    WALSH, R
    ANNUAL REPORTS ON THE PROGRESS OF CHEMISTRY SECTION A-PHYSICAL & INORGANIC CHEMISTRY, 1971, 68 : 175 - 193
  • [44] Theoretical studies on the kinetics and thermochemistry of the gas-phase addition and H-abstraction reactions of 4-picoline with OH radical
    Devi, Kh Jogeshwari
    Parveen, Salma
    Chandra, Asit K.
    CHEMICAL PHYSICS LETTERS, 2009, 480 (4-6) : 161 - 167
  • [45] KINETICS OF SOME GAS-PHASE ELEMENTARY REACTIONS OF BORON MONOFLUORIDE
    LIGHT, GC
    HERM, RR
    MATSUMOTO, JH
    JOURNAL OF PHYSICAL CHEMISTRY, 1985, 89 (23): : 5066 - 5074
  • [46] A MICROCHEMICAL STUDY OF GAS-PHASE KINETICS FOR 3 IRREVERSIBLE REACTIONS
    RETZLOFF, DG
    COULL, BM
    COULL, J
    JOURNAL OF PHYSICAL CHEMISTRY, 1970, 74 (12): : 2455 - &
  • [47] KINETICS OF ABSTRACTION REACTIONS OF METHYL RADICALS WITH ALKANES IN GAS-PHASE
    SWAY, MI
    INDIAN JOURNAL OF CHEMISTRY SECTION A-INORGANIC BIO-INORGANIC PHYSICAL THEORETICAL & ANALYTICAL CHEMISTRY, 1990, 29 (08): : 748 - 752
  • [48] KINETICS OF SOME REACTIONS OF VINYL AND ISOPROPYL RADICALS IN THE GAS-PHASE
    SZIROVICZA, L
    INTERNATIONAL JOURNAL OF CHEMICAL KINETICS, 1985, 17 (01) : 117 - 130
  • [49] Kinetics of the gas-phase reactions of OH radicals with alkanes and cycloalkanes
    Atkinson, R
    ATMOSPHERIC CHEMISTRY AND PHYSICS, 2003, 3 : 2233 - 2307
  • [50] GAS-PHASE KINETICS OF ATOMIC SI AND GE OXIDATION REACTIONS
    SWEARENGEN, PM
    DAVIS, SJ
    HADLEY, SG
    NIEMCZYK, TM
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1977, 173 (MAR20): : 163 - 163
12345