Thermochemistry and kinetics of gas-phase reactions relevant to the CVD of coatings: new data for process models

被引：0

作者：

Allendorf, M.D. ^{[1
]}

Melius, C.F. ^{[1
]}

Mcdaniel, A.H. ^{[1
]}

机构：

[1] Combustion Research Facility, Sandia National Laboratories, Livermore, CA 94551-0969, United States

来源：

Materials Research Society Symposium - Proceedings | 1999年 / 555卷

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摘要：

引用

页码：121 / 134

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