Fabrication of silicon field emitter arrays integrated with beam focusing lens

被引：0
|
作者：
Yamaoka, Yoshikazu [1 ]
Kanemaru, Seigo [1 ]
Itoh, Junji [1 ]
机构：
[1] Sanyo Electric. Co, Ltd, Ibaraki, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1996年 / 35卷 / 12 B期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：6347 / 6695
相关论文
共 50 条
  • [41] Amorphous-silicon-on-glass field emitter arrays
    Gamo, H
    Kanemaru, S
    Itoh, J
    IEEE ELECTRON DEVICE LETTERS, 1996, 17 (06) : 261 - 263
  • [42] Emission stability of anodized silicon field emitter arrays
    Kim, HR
    Jessing, JR
    Parker, DL
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (02): : 601 - 603
  • [43] Polycrystalline silicon field emitter arrays with a gated structure
    Song, YH
    Lee, JH
    Kang, SW
    Yu, BG
    Cho, KI
    Yoo, HJ
    PROCEEDINGS OF THE FOURTH ASIAN SYMPOSIUM ON INFORMATION DISPLAY, 1997, : 145 - 146
  • [44] High current silicon nanowire field emitter arrays
    Bachmann, Michael
    Duesberg, Felix
    Pahlke, Andreas
    Edler, Simon
    Schels, Andreas
    Herdl, Florian
    Lawrowski, Robert
    Schreiner, Rupert
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2022, 40 (01):
  • [45] MAGNETIC FOCUSING OF AN ELECTRON BEAM FROM A POINT FIELD EMITTER
    Urbanski, Pawel
    Szyszka, Piotr
    Grzebyk, Tomasz
    2023 IEEE 36TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE, IVNC, 2023, : 37 - 39
  • [46] FABRICATION OF DOUBLE-GATED SI FIELD EMITTER ARRAYS FOR FOCUSED ELECTRON-BEAM GENERATION
    ITOH, J
    TOHMA, Y
    MORIKAWA, K
    KANEMARU, S
    SHIMIZU, K
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (05): : 1968 - 1972
  • [47] A new fabrication process of field emitter arrays with submicron gate apertures using local oxidation of silicon
    Lee, CG
    Park, BG
    Lee, JD
    IEEE ELECTRON DEVICE LETTERS, 1996, 17 (03) : 115 - 117
  • [48] Fabrication and characterization of individually ballasted carbon nanotube field emitter arrays using doped silicon resistor
    Li, Yunhan
    Sun, Yonghai
    Yeow, John T. W.
    2017 IEEE 17TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO), 2017, : 495 - 498
  • [49] Fabrication and characterization of silicon field emitter arrays by spin-on-glass etch-back process
    Lee, JH
    Kang, SW
    Song, YH
    Cho, KI
    Lee, SY
    Yoo, HJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (01): : 238 - 241
  • [50] Silicon field emitter cathodes: Fabrication, performance, and applications
    Temple, D
    Palmer, WD
    Yadon, LN
    Mancusi, JE
    Vellenga, D
    McGuire, GE
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1998, 16 (03): : 1980 - 1990
12345