Fabrication of silicon field emitter arrays integrated with beam focusing lens

被引：0
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作者：
Yamaoka, Yoshikazu [1 ]
Kanemaru, Seigo [1 ]
Itoh, Junji [1 ]
机构：
[1] Sanyo Electric. Co, Ltd, Ibaraki, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1996年 / 35卷 / 12 B期
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页码：6347 / 6695
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