Fabrication of silicon microsystems

被引：1
|
作者：
Wood, David [1 ]
机构：
[1] School of Engineering, University of Durham, South Road, Durham DH1 3LE, United Kingdom
来源：
Engineering Science and Education Journal | 2000年 / 9卷 / 03期
关键词：
D O I：
10.1049/esej:20000305
中图分类号：
学科分类号：
摘要：
14
引用
收藏
页码：129 / 136
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