Enhanced sensitivity to force gradients by using higher flexuralmodes of the atomic force microscope cantilever

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作者：
Hoummady, M. [1 ,2 ]
Farnault, E. [1 ]
机构：
[1] Laboratory for Integrated Micro-Mechatronic Systems (LIMMS), Institute of Industrial Science, University of Tokyo, 7-22-1 Roppongi, Minato-ku, Tokyo 106, Japan
[2] Laboratoire de Physique et Métrologie des Oscillateurs (LPMO), Centre National de la Recherche Scientifique (CNRS UPR 3203), 32 Avenue de l'Observatoire, 25044 Besançon Cedex, France
来源：
Applied Physics A: Materials Science and Processing | 1998年 / 66卷 / SUPPL. 1期
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