MANUFACTURING TECHNOLOGY PROGRAM TO DEVELOP A PRODUCTION ION IMPLANTATION FACILITY FOR PROCESSING BEARINGS AND TOOLS.
被引:0
作者:
Smidt, F.A.
论文数: 0引用数: 0
h-index: 0
机构:
US Naval Research Lab, Washington,, DC, USA, US Naval Research Lab, Washington, DC, USAUS Naval Research Lab, Washington,, DC, USA, US Naval Research Lab, Washington, DC, USA
Smidt, F.A.
[1
]
Sartwell, B.D.
论文数: 0引用数: 0
h-index: 0
机构:
US Naval Research Lab, Washington,, DC, USA, US Naval Research Lab, Washington, DC, USAUS Naval Research Lab, Washington,, DC, USA, US Naval Research Lab, Washington, DC, USA
Sartwell, B.D.
[1
]
机构:
[1] US Naval Research Lab, Washington,, DC, USA, US Naval Research Lab, Washington, DC, USA
来源:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
|
1984年
/
B6卷
/
1-2期