CHANGES OF VOLUME AND SURFACE COMPOSITIONS OF POLYMETHYLMETHACRYLATE UNDER ELECTRON BEAM IRRADIATION IN LITHOGRAPHY.

被引：0
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作者：
Samoto, Norihiko [1 ]
Shimizu, Ryuichi [1 ]
Hashimoto, Hatsujiro [1 ]
机构：
[1] Osaka Univ, Faculty of Engineering,, Suita, Jpn, Osaka Univ, Faculty of Engineering, Suita, Jpn
来源：
| 1600年 / 24期
关键词：
ELECTRON BEAMS - Applications - INTEGRATED CIRCUIT MANUFACTURE - LITHOGRAPHY - SPECTROSCOPY; AUGER ELECTRON;
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摘要：
The change of the content of oxygen and carbon in polymethylmethacrylate (PMMA) under electron beam irradiation is investigated by Auger electron spectroscopy (AES) whereby the authors estimate the characteristic energy deposition of the decrement of oxygen to be 0. 8-1. 2 multiplied by 10**3 ev/nm**3. It is also confirmed that cooling of PMMA considerably reduces the elimination rate of oxygen and that the decrement of the thickness of PMMA film under electron beam irradiation is closely related to the change of oxygen content. Moreover, it is shown that the PMMA alters from the positive resist to the negative resist as determined by observing thickness changes.
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