Analysis of electron emission degradation in silicon field emitter arrays

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作者：
Song, Yoon-Ho
Lee, Jin Ho
Kang, Seung-Youl
Lee, Yong-Il
Cho, Kyoung Ik
Yoo, Hyung Joun
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Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 1998年 / 16卷 / 02期
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