Large-area high-density plasma excitation using standing pure and hybrid surface waves

被引：0
|
作者：
Ghanashev, I. [1 ]
Nagatsu, M. [1 ]
Morita, S. [1 ]
Sugai, H. [1 ]
机构：
[1] Department of Electrical Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
来源：
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1998年 / 16卷 / 03期
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页码：1537 / 1541
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