Nanomechanical surface characterization by atomic force acoustic microscopy

被引：0
|
作者：
Rabe, U. [1 ]
Scherer, V. [1 ]
Hirsekorn, S. [1 ]
Arnold, W. [1 ]
机构：
[1] Fraunhofer Inst for Nondestructive, Testing (IxfP), Saarbruecken, Germany
来源：
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | 1997年 / 15卷 / 04期
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摘要：
23
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页码：1506 / 1511
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