Wear-resistant thin films of amorphous carbon nitride prepared by shielded arc ion plating

被引：0
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作者：
Tajima, Nobuhiro [1 ]
Saze, Hiroki [1 ]
Sugimura, Hiroyuki [1 ]
Takai, Osamu [1 ]
机构：
[1] Nagoya Univ, Nagoya, Japan
来源：
Japanese Journal of Applied Physics, Part 2: Letters | 1999年 / 38卷 / 10 A期
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D O I：
10.1143/jjap.38.l1131
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