Computer simulation of point-defect fields and microdefect patterns in Czochralski-grown Si crystals

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作者：
Puzanov, Nikolai I. [1 ]
Eidenzon, Anna M. [1 ]
Puzanov, Dmitri N. [1 ]
Furukawa, Jun [1 ,2 ]
Harada, Kazuhiro [1 ,3 ]
Ono, Naoki [1 ,2 ]
Shimanuki, Yasushi [1 ,2 ]
机构：
[1] Podolsk Chemical-Metallurgical Plant, Podolsk, Moscow Region, 142100, Russia
[2] Mitsubishi Materials Silicon Corporation, Technology Division, 314 Nishisangao, Noda, Chiba 278-0015, Japan
[3] Mitsubishi Materials Silicon Corporation, Production Division, 4-3146-12 Yawatahara, Yonezawa, Yamagata 992-1128, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2002年 / 41卷 / 2 A期
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页码：464 / 471
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