Defect production, degradation, and breakdown of silicon dioxide films

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IBM Thomas J. Watson Research Cent, Yorktown Heights, United States ^{[1
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Solid State Electron | / 7卷 / 957-965期

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[1] Defect production, degradation, and breakdown of silicon dioxide films
Dimaria, DJ
SOLID-STATE ELECTRONICS, 1997, 41 (07) : 957 - 965
[2] DEGRADATION AND BREAKDOWN OF SILICON DIOXIDE FILMS ON SILICON
DIMARIA, DJ
ARNOLD, D
CARTIER, E
APPLIED PHYSICS LETTERS, 1992, 61 (19) : 2329 - 2331
[3] IMPACT IONIZATION, TRAP CREATION, DEGRADATION, AND BREAKDOWN IN SILICON DIOXIDE FILMS ON SILICON
DIMARIA, DJ
CARTIER, E
ARNOLD, D
JOURNAL OF APPLIED PHYSICS, 1993, 73 (07) : 3367 - 3384
[4] Anode hole injection, defect generation, and breakdown in ultrathin silicon dioxide films
DiMaria, DJ
Stathis, JH
JOURNAL OF APPLIED PHYSICS, 2001, 89 (09) : 5015 - 5024
[5] Degradation and breakdown of thin silicon dioxide films under dynamic electrical stress
Nafria, M
Sune, J
Yelamos, D
Aymerich, X
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1996, 43 (12) : 2215 - 2226
[6] ACCELERATED DIELECTRIC BREAKDOWN OF SILICON DIOXIDE FILMS
OSBURN, CM
CHOU, NJ
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (10) : 1377 - 1384
[7] Surface plasmons and breakdown in thin silicon dioxide films on silicon
Kim, JH
Sanchez, JJ
DeMassa, TA
Quddus, MT
Smith, D
Shaapur, F
Weiss, K
Liu, CH
JOURNAL OF APPLIED PHYSICS, 1998, 84 (03) : 1430 - 1438
[8] DEFECT STRUCTURE OF GROWN SILICON DIOXIDE FILMS
REVESZ, AG
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1965, ED12 (03) : 97 - +
[9] TIME-DEPENDENT BREAKDOWN IN SILICON DIOXIDE FILMS
SVENSSON, C
SHUMKA, A
INTERNATIONAL JOURNAL OF ELECTRONICS, 1975, 38 (01) : 69 - 80
[10] Breakdown of thin gate silicon dioxide films - a review
Universitat Autonoma de Barcelona, Bellaterra, Spain
Microelectron Reliab, 7-8 (871-905):

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