Development of liquid polyatomic ion beam system for surface modification

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作者：
Takaoka, Gikan H. [1 ]
Tsumura, Kazumichi [1 ]
Yamamoto, Tomoaki [1 ]
机构：
[1] Ion Beam Eng. Experimental Lab., Kyoto University, Sakyo, Kyoto 606-8501, Japan
来源：
Japanese Journal of Applied Physics, Part 2: Letters | 2002年 / 41卷 / 6 A期
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