Micromachined optical near-field bow-tie antenna probe with integrated electrostatic actuator

被引：0
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作者：
Ono, Takahito [1 ]
Iwami, Kentaro [1 ]
Esashi, Masayoshi [2 ]
机构：
[1] Graduate School of Engineering, Tohoku University, 6-6-01 Aza Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
[2] New Industry Creation Hatchery Center, Tohoku University, 6-6-01 Aza Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
来源：
Japanese Journal of Applied Physics, Part 2: Letters | 2005年 / 44卷 / 12-15期
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