Observation of microdefects in As-grown Czochralski silicon crystals by synchrotron radiation topography

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[1] Sugita, Yoshimitsu
[2] Iida, Satoshi
[3] Aoki, Yoshirou
[4] Okitsu, Kouhei
[5] Tsuneda, Masayuki
[6] Takeno, Hiroshi
[7] Abe, Takao
[8] Kawata, Hiroshi
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Sugita, Yoshimitsu | 1600年 / 32期
关键词：
Semiconducting silicon;
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